PLANAR PROJECTOR AND METHOD FOR MANUFACTURING ELEMENT

Japanese Patent JP3713479

B2

PROBLEM TO BE SOLVED: To reduce a force for moving a slider, i.e., a movable member consti tuting a substrate table or a mask table in a planar device, by keeping pressure being applied to both sides of the slider at a uniform level thereby minimizing the deformation of the movable member while reducing its weight.
SOLUTION: A slider 10 is provided in order to move a substrate table or a mask table. The slider 10 is supported by a gas bearing 14 and separating the region of atmospheric pressure from the region of vacuum space. A pressure difference seal 16 is provided in order to sustain a pressure difference at the gas bearing 14. A pressure correction container 20 is mounted on the slider 10 while communicating with the vacuum space. Across the almost all regions of the slider 10, pressures on first and second opposite sides thereof are identical and thereby the deformation of the slider is eliminated. External gas pressure is transmitted to the slider 10 such that the sidewall 30 side of the pressure correction container 20 is in harmony with the force of the gas bearing 14.

JP2796404	[Title of the Invention] An exposure method and an apparatus thereof, a thin film production control method using the same, and an apparatus thereof.
JP4667290	Lithography equipment and device manufacturing method
WO/2022/044308	LASER APPARATUS, WAVELENGTH CONTROL METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Ronald Marten Schneider
Jacob Wyuchwinkel

JP2002322668A

November 09, 2005

November 06, 2002

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AJMEL Netherlands Lands Beth Rotten Fuennaught Shap

G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20

JP2000331930A
JP2001168173A
JP9219357A
JP7130604A
JP6275489A

Hideto Asamura
Hajime Asamura
Toru Mori
Yutaka Yoshida

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