Title:
PLASMA REACTOR
Document Type and Number:
Japanese Patent JP2003001104
Kind Code:
A
Abstract:
To keep controlling a depression of a discharge performance due to an early deterioration of an electrode over the long term and also reduce a replacement frequency of an electrode, in a plasma rector (20) which performs a gas treatment and the like by generating a low temperature plasma by discharge.
A plurality of discharge parts (21a) set in each discharge position of the electrode (21) are severally composed of the movable parts (21d) which can convertibly use the plurality of discharge edges.
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Inventors:
TANAKA TOSHIO
MOGI KANJI
KAGAWA KENKICHI
MOGI KANJI
KAGAWA KENKICHI
Application Number:
JP2001184523A
Publication Date:
January 07, 2003
Filing Date:
June 19, 2001
Export Citation:
Assignee:
DAIKIN IND LTD
International Classes:
H05H1/48; A61L9/00; B01J19/08; (IPC1-7): B01J19/08; A61L9/00; H05H1/48
Attorney, Agent or Firm:
Hiroshi Maeda (7 outside)