Title:
POLISHING DEVICE, POLISHING METHOD, AND CASSETTE
Document Type and Number:
Japanese Patent JP2021192934
Kind Code:
A
Abstract:
To provide a polishing device capable of automatically exchanging a polishing tape.SOLUTION: A polishing head unit 40 is provided with a cassette 50 that is detachably provided on the polishing head unit 40 provided on a vertically upper side of a stage 71 on which work is placed, and is provided with a polishing tape inside, and a carrying portion 30 that carries the cassette 50 between the polishing head unit and a cassette holding portion 10. The carrying portion 30 carries the cassette 50 provided with the polishing tape inside, between the polishing head unit 40 and the cassette holding portion 10. A fixing portion presses the cassette 50 with a rod-shaped portion to fix the cassette 50 to the polishing head unit 40, while a first drive shaft provided on the polishing head unit 40 is inserted in a first reel of the cassette and a second drive shaft provided on the polishing head unit 40 is inserted in a second reel of the cassette 50. Therefore, the polishing tape can be automatically exchanged.SELECTED DRAWING: Figure 1
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Inventors:
YAMAMURO TSUYOSHI
Application Number:
JP2020099635A
Publication Date:
December 23, 2021
Filing Date:
June 08, 2020
Export Citation:
Assignee:
V TECH CO LTD
International Classes:
B24B21/00; B24B21/18; B24B45/00
Attorney, Agent or Firm:
Yukari Sakata