Title:
POLISHING DISPERSION LIQUID, POLISHING SHEET, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2020161531
Kind Code:
A
Abstract:
To provide a polishing dispersion liquid capable of maintaining a state for a long time in which diamond particles are dispersed in a state of primary particles.SOLUTION: A method for manufacturing a polishing dispersion liquid includes steps of: obtaining a mixture of diamond particles having a primary median diameter of 0.1 to 5.0 μm and a polymer having a basic functional group having an amine value of 1.0 to 50 mg KOH/g in an organic solvent; and irradiating the mixture with ultrasound. The dispersion liquid is obtained by the same.SELECTED DRAWING: Figure 1
Inventors:
SATO MAKOTO
TAMURA MASAAKI
SUGURO KYOICHI
TAMURA MASAAKI
SUGURO KYOICHI
Application Number:
JP2019056488A
Publication Date:
October 01, 2020
Filing Date:
March 25, 2019
Export Citation:
Assignee:
CARLIT HOLDINGS CO LTD
International Classes:
H01L21/304; B24B37/00; B24D3/00; B24D11/00; C09K3/14