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Patent Searching and Data


Title:
POLISHING METHOD
Document Type and Number:
Japanese Patent JP2005177944
Kind Code:
A
Abstract:

To provide a polishing method capable of finishing and processing a surface of a work piece in high precision and in high efficiency by dissolving a problem of reduction in delivery speed of abrasive grains due to reduction of flow velocity in the neighborhood of the surface of the work piece which conventional technology has.

The delivery speed of the abrasive grains necessary for EEM process is obtained by mixing mother grains a grain diameter of which is larger than that of the abrasive grains in polishing liquid and pushing the abrasive grains carried at the lower flow velocity in the neighborhood of the surface of the work piece by the mother grains carried at the higher flow velocity in the neighborhood of a polishing tool.


Inventors:
OZAKI MUNEKATSU
Application Number:
JP2003424741A
Publication Date:
July 07, 2005
Filing Date:
December 22, 2003
Export Citation:
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Assignee:
CANON KK
International Classes:
B24B1/00; B24B37/00; (IPC1-7): B24B1/00; B24B37/00
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio