重合体およびポジ型レジスト組成物

Title:

重合体およびポジ型レジスト組成物

Document Type and Number:

Japanese Patent JP4570910

Kind Code:

B2

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Inventors:

Hideo Haneda
Ryotaro Hayashi
Takeshi Iwai
Satoshi Fujimura
Shogo Matsumaru
Takeshita Yu

Application Number:

JP2004169589A

Publication Date:

October 27, 2010

Filing Date:

June 08, 2004

Export Citation:

Assignee:

Tokyo Ohka Kogyo Co., Ltd.

International Classes:

C08F32/08; G03F7/039; C08G61/08; H01L21/027

Domestic Patent References:

Foreign References:

US20040076903

Attorney, Agent or Firm:

Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai

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