Title:
POLYMER
Document Type and Number:
Japanese Patent JP2015052115
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a polymer useful as a component of a composition for forming an immersion overlay film, from which an immersion overlay film that can develop good water repellency and solubility in a developing solution in a well-balanced manner and suppresses generation of defects in a resist can be formed.SOLUTION: The polymer has a structural unit (I) including a group expressed by formula (i). In the formula, Rrepresents a halogen atom, nitro group, alkyl group, monovalent alicyclic hydrocarbon group, alkoxy group, acyl group, aralkyl group, aryl group, or a substitution product of these groups; Rrepresents -C(=O)-R, -S(=O)-R, -R-CN or -R-NO; Rand Rrepresent H, alkyl group, fluorinated alkyl group, monovalent alicyclic hydrocarbon group, alkoxy group, cyano group, cyanomethyl group, aralkyl group or aryl group; and Rand Rrepresent a single bond, a methylene group or an alkylene group having 2 to 5 carbon atoms.
Inventors:
TANAKA KIKA
KUSAKAI KAZUNORI
HAYAMA TAKAHIRO
SHIMA MOTOYUKI
KUSAKAI KAZUNORI
HAYAMA TAKAHIRO
SHIMA MOTOYUKI
Application Number:
JP2014188325A
Publication Date:
March 19, 2015
Filing Date:
September 16, 2014
Export Citation:
Assignee:
JSR CORP
International Classes:
C08F20/26; C08F20/36; C08F20/38; H01L21/027
Domestic Patent References:
| JP2006243264A | 2006-09-14 | |||
| JPH093128A | 1997-01-07 | |||
| JP2006045540A | 2006-02-16 | |||
| JPS5676418A | 1981-06-24 | |||
| JP2006171667A | 2006-06-29 | |||
| JPH1112325A | 1999-01-19 | |||
| JPH093127A | 1997-01-07 | |||
| JP2015057477A | 2015-03-26 |
Foreign References:
| US4365040A | 1982-12-21 | |||
| US5856521A | 1999-01-05 |
Attorney, Agent or Firm:
Kazuki Amano
Previous Patent: ANISOTROPIC CONDUCTIVE ADHESIVE
Next Patent: OXIDATION-STABLE IRON OXIDE PIGMENT AND PREPARATION METHOD AND USAGE OF THE SAME
Next Patent: OXIDATION-STABLE IRON OXIDE PIGMENT AND PREPARATION METHOD AND USAGE OF THE SAME