感放射線性樹脂組成物用重合体、及び感放射線性樹脂組成物

Title:

感放射線性樹脂組成物用重合体、及び感放射線性樹脂組成物

Document Type and Number:

Japanese Patent JP4848910

Kind Code:

B2

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Inventors:

Kenji Hoshiko
Mineki Kawakami
Nishimura Yukio

Application Number:

JP2006263930A

Publication Date:

December 28, 2011

Filing Date:

September 28, 2006

Export Citation:

Assignee:

JSR CORPORATION

International Classes:

C08F20/38; G03F7/039; G03F7/20; G03F7/38; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Ippei Watanabe
Koji Kikawa
Chongqing Sugano

Previous Patent: JPS4848909

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