To provide a position control device capable of controlling a position with high accuracy without depending on distance.
A position control device 100 comprises: first control means 31 for acquiring first information, determining whether a difference between a distance from a reference position B specified by the first information to a stage 1 and a desired distance is within a given range or not, and, if not, performing a first position control processing to control the position of the stage 1 so that the difference is within the given range; and second control means 32 for, if the difference is within the given range, acquiring a second information and performing a second position control processing to control the position of the stage 1 so that the distance between the reference position B and the stage 1 becomes the desired one, based on the distance between the reference position B and the stage 1 specified by the second information.
TSUJI SEIGO
Mitsue Obuchi