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Patent Searching and Data


Title:
POSITION CONTROL DEVICE AND POSITION CONTROL METHOD
Document Type and Number:
Japanese Patent JP2012038139
Kind Code:
A
Abstract:

To provide a position control device capable of controlling a position with high accuracy without depending on distance.

A position control device 100 comprises: first control means 31 for acquiring first information, determining whether a difference between a distance from a reference position B specified by the first information to a stage 1 and a desired distance is within a given range or not, and, if not, performing a first position control processing to control the position of the stage 1 so that the difference is within the given range; and second control means 32 for, if the difference is within the given range, acquiring a second information and performing a second position control processing to control the position of the stage 1 so that the distance between the reference position B and the stage 1 becomes the desired one, based on the distance between the reference position B and the stage 1 specified by the second information.


Inventors:
YOSHINARI YOSUKE
TSUJI SEIGO
Application Number:
JP2010178527A
Publication Date:
February 23, 2012
Filing Date:
August 09, 2010
Export Citation:
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Assignee:
JEOL LTD
International Classes:
G05D3/12; H01J37/20; G05B19/19
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi