Title:
POSITIONING METHOD OF CHARGED OBJECT AND STATIC ELECTRICITY REMOVING DEVICE
Document Type and Number:
Japanese Patent JP2019119921
Kind Code:
A
Abstract:
To provide a positioning method of a charged object and a static electricity removing device, capable of removing static electricity without reducing a vacuum degree in a chamber, in the same chamber with that in film making processing.SOLUTION: A high vacuum processing mechanism D requiring high vacuum and an electricity removing mechanism S are provided in a chamber 1 which is kept in high vacuum. The electricity removing mechanism S is constituted with a discharge electrode 3 to which voltage is applied, a ground electrode 4 connected to the ground, and a gas supply means for supplying gas G into an electric field E1 formed by the voltage apply discharge electrode 3 and the ground electrode 4, and plasma is generated in the electric field E1. A proper density of the plasma is specified according to a charged amount of the charged object 2, and a position of the charged object 2 is specified with reference of the proper position where an electricity removing object face 2a of the charged object 2 is exposed, in plasma atmosphere in an area A1 in which the proper density is formed.SELECTED DRAWING: Figure 1
Inventors:
IKEHATA TAKASHI
NOMURA NOBUO
MINEMURA KAZUKI
MOGAMI TOMOFUMI
NOMURA NOBUO
MINEMURA KAZUKI
MOGAMI TOMOFUMI
Application Number:
JP2018002302A
Publication Date:
July 22, 2019
Filing Date:
January 11, 2018
Export Citation:
Assignee:
UNIV IBARAKI
KASUGA ELECTRIC CO
KASUGA ELECTRIC CO
International Classes:
C23C14/54; C23C14/02; H01L21/31; H01L21/683; H05F3/04; H05H1/46
Domestic Patent References:
| JPH0586470A | 1993-04-06 | |||
| JPH08176822A | 1996-07-09 |
Attorney, Agent or Firm:
Nobuyuki Shima