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Patent Searching and Data


Title:
POSITIVE PHOTORESIST COMPOSITION
Document Type and Number:
Japanese Patent JP2001188348
Kind Code:
A
Abstract:

To provide a positive photoresist composition having high resolving power in the production of a semiconductor device, having evaluation with the same light exposure near the margin of resolution by which the size in which a nondense pattern vanishes and the marginal resolution size of a dense pattern show approximate values closer to each other and ensuring low surface roughness of a line pattern.

The positive photoresist composition contains a resin containing repeating units with a specified structure and having solubility to an alkali developing solution increased by the action of an acid, a compound which generates the acid when irradiated with active light or radiation and an organic solvent which dissolves the above components.


Inventors:
MIZUTANI KAZUYOSHI
YASUNAMI SHOICHIRO
Application Number:
JP2000303875A
Publication Date:
July 10, 2001
Filing Date:
October 03, 2000
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G03F7/039; C08F220/10; C08F222/00; C08F230/08; C08K5/00; C08L33/04; C08L35/00; C08L43/04; G03F7/004; G03F7/075; H01L21/027; (IPC1-7): G03F7/039; C08F220/10; C08F222/00; C08F230/08; C08K5/00; C08L33/04; C08L35/00; C08L43/04; G03F7/004; H01L21/027
Attorney, Agent or Firm:
Shohei Oguri (4 outside)