Title:
ポジ型フォトレジスト組成物
Document Type and Number:
Japanese Patent JP4190141
Kind Code:
B2
Inventors:
Kazuyoshi Mizutani
Kenichiro Sato
Shoichiro Anami
Kenichiro Sato
Shoichiro Anami
Application Number:
JP2000328968A
Publication Date:
December 03, 2008
Filing Date:
October 27, 2000
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; C08F230/08; C08K5/03; C08K5/16; C08K5/375; C08L43/04; C08L71/02; C08L83/04; G03F7/004; G03F7/075; H01L21/027
Domestic Patent References:
| JP8022125A | ||||
| JP2000267287A | ||||
| JP2000187329A | ||||
| JP2000187330A | ||||
| JP2002030118A | ||||
| JP4037018B2 | ||||
| JP2001188348A | ||||
| JP2003518524A | ||||
| JP2001188349A | ||||
| JP2000298346A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa