Title:
PROCESS FOR MANUFACTURING LIQUID EJECTING HEAD
Document Type and Number:
Japanese Patent JP3900277
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a process for manufacturing a liquid ejecting head in which the nozzle can be prevented from being choked with a foreign matter, e.g. a fragment of a diaphragm.
SOLUTION: Adhesion of a foreign matter to the inside of a channel is prevented by a method comprising a step for forming a diaphragm and a piezoelectric element 300 on one side of a channel forming substrate 10, a step for forming a pressure generating chamber 12 and a section 13 communicating with one longitudinal end part of the pressure generating chamber 12 by etching the channel forming substrate 10 from the other side until the diaphragm is reached, a step for forming a through part 110 opening to the communicating section 13 in a region of the diaphragm facing the communicating section 13 while immersing the channel forming substrate 10 and the diaphragm into a specified liquid 200, and a step for cleaning the channel including the through part 110.
Inventors:
Hiroyuki Kamei
Application Number:
JP2002334086A
Publication Date:
April 04, 2007
Filing Date:
November 18, 2002
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B41J2/16; B41J2/045; B41J2/055; (IPC1-7): B41J2/16; B41J2/045; B41J2/055
Domestic Patent References:
| JP2002292871A |
Attorney, Agent or Firm:
Hiroyuki Kurihara
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