Title:
加工装置および加工方法
Document Type and Number:
Japanese Patent JP7192758
Kind Code:
B2
Abstract:
To suppress deterioration in processing accuracy.SOLUTION: A processing device correction method is applied to a method of correcting a processing device including a position change part which changes relative position of a processed workpiece and a tool and a control part which controls the position change part. Then a plurality of processed marks are formed before processing of the processed workpiece, and a control value outputted to the position change part is corrected based on a difference between relative positional relationship of the plurality of processed marks and relative positional relationship of a processed shape indicated by the control part.SELECTED DRAWING: Figure 3
Inventors:
Tomoaki Yamada
Application Number:
JP2019231826A
Publication Date:
December 20, 2022
Filing Date:
December 23, 2019
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G05B19/404; B23Q17/24
Domestic Patent References:
| JP2000126989A | ||||
| JP2015183640A | ||||
| JP2004009293A | ||||
| JP2002366212A | ||||
| JP2011167787A | ||||
| JP2007000966A | ||||
| JP7009303A | ||||
| JP2006231428A | ||||
| JP2003205442A |
Foreign References:
| WO2009057229A1 |
Attorney, Agent or Firm:
Kazuzumi Nishizawa
Kazunori Onami
Junichi Kobayashi
Kazunori Onami
Junichi Kobayashi