Title:
Processing equipment
Document Type and Number:
Japanese Patent JP6327954
Kind Code:
B2
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| JP5340832 | How to fix the end face of the mount flange |
| WO/2003/103900 | TOOL HOLDING FIXTURE AND INSERT TOOL |
Inventors:
Tag Masaki
Tomoharu Kihara
Katsuhiko Sekiya
Tomoharu Kihara
Katsuhiko Sekiya
Application Number:
JP2014112993A
Publication Date:
May 23, 2018
Filing Date:
May 30, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B23Q3/155; B23Q17/00; B24B27/06; H01L21/301; H01L21/304
Domestic Patent References:
| JP2009241177A | ||||
| JP4331045A | ||||
| JP2001144034A | ||||
| JP61209858A | ||||
| JP62218051A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto