Title:
合成石英ガラス基板の加工方法
Document Type and Number:
Japanese Patent JP7342839
Kind Code:
B2
Abstract:
A synthetic quartz glass substrate is machined by bringing a surface of the synthetic quartz glass substrate as the workpiece into contact with and superposing it on a surface of a protective member made of synthetic quartz glass to effect optical contact bonding of the workpiece and the protective member, and passing a cutting tool through the optical contact bonding surfaces. This machining process is able to effectively prevent the generation of microdefects at the cutting tool entry site and extraction site during a cutting operation. Moreover, a fixing agent is not used to join the workpiece and the protective member, and so productivity is high because there is no need for the application and later removal of a fixing agent.
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Inventors:
Masao Ando
Hiroyuki Yamazaki
Hiroyuki Yamazaki
Application Number:
JP2020179551A
Publication Date:
September 12, 2023
Filing Date:
October 27, 2020
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C03B33/023; C03B20/00
Domestic Patent References:
| JP6198530A | ||||
| JP2012254624A | ||||
| JP2016180798A | ||||
| JP2011000557A | ||||
| JP8118124A | ||||
| JP2015134695A | ||||
| JP11145438A | ||||
| JP6353135B1 | ||||
| JP2006021944A | ||||
| JP2007170958A |
Attorney, Agent or Firm:
Patent Attorney Corporation Eimei International Patent Office