Title:
PRODUCTION OF ARTICLE COMPRISING REFRACTORY DIELECTRIC SUBSTANCE
Document Type and Number:
Japanese Patent JP3373796
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce both a surface impurity and a bulk impurity approximately without removing the surface of a refractory dielectric substance.
SOLUTION: A refractory dielectric substance is heated by a plasma fire ball 12 under conditions capable of not causing the removal of a considerable amount of the surface part of a refractory dielectric substance 20 and sufficiently reducing both a surface impurity and a bulk impurity. Isothermal oxygen or an oxygen-containing plasma is used. At least 30% of a chlorine impurity at least 10 μm in depth can be reduced while simultaneously removing a hydroxyl group impurity. Consequently the concentration of an impurity to be a cause of a defect in the drawing treatment of a fiber from a preform can be reduced without requiring the removal of a considerable amount of the preform from the surface.
Inventors:
James W. Fleming
Robert M. Puff Check
Robert M. Puff Check
Application Number:
JP27384898A
Publication Date:
February 04, 2003
Filing Date:
September 28, 1998
Export Citation:
Assignee:
Lucent Technologies, Inc.
International Classes:
G02B6/00; B01J19/08; C03B20/00; C03B29/02; C03B37/012; C03B37/014; C03C23/00; C03C25/62; (IPC1-7): C03B20/00; B01J19/08; C03B37/012
Domestic Patent References:
| JP4132630A | ||||
| JP6221724A |
Attorney, Agent or Firm:
Masao Okabe (10 outside)