Title:
PRODUCTION OF OXIDE SUPERCONDUCTOR THIN FILM
Document Type and Number:
Japanese Patent JP2809553
Kind Code:
B2
Abstract:
PURPOSE: To control the critical temperature of the oxide superconductor thin film by forming an epitaxial film comprising a crystal represented by a specific formula and having lattice constants similar to those of an oxide superconductor on a substrate and further forming the thin film of the oxide superconductor on the epitaxial film.
CONSTITUTION: An epitaxial film comprising a crystal having a lattice constant similar to that of the crystal of a prescribed oxide superconductor is formed on a heated SrTiO3 substrate having a (100) surface by an RF magnetron spattering method using a Sr1-xBaxTiO3 sintered product as a target. Subsequently, a tetragonal oxide superconductor thin film represented by the formula (A is Ca, Sr, Ba; B is a rare earth metal; (x) is 0-0.5; (y) is 1.95-2.30) such as Sr1-xNdxCuOy, having lattice constants comprising 0.385-0.410nm on the (a) axis and the integral times of 0.310-0.350nm on the (c) axis and further having a prescribed film thickness and a prescribed critical temperature is formed on the epitaxial film by the RF magnetron spattering method.
Inventors:
YAMAMOTO KYOSHI
SUGII NOBUYUKI
KUBO KOICHI
ICHIKAWA MICHIHARU
YAMAUCHI HISAO
SUGII NOBUYUKI
KUBO KOICHI
ICHIKAWA MICHIHARU
YAMAUCHI HISAO
Application Number:
JP10671792A
Publication Date:
October 08, 1998
Filing Date:
April 24, 1992
Export Citation:
Assignee:
FURUKAWA DENKI KOGYO KK
HITACHI SEISAKUSHO KK
TOSHIBA KK
DENRYOKU CHUO KENKYUSHO
KOKUSAI CHODENDO SANGYO GIJUTSU KENKYU SENTAA
HITACHI SEISAKUSHO KK
TOSHIBA KK
DENRYOKU CHUO KENKYUSHO
KOKUSAI CHODENDO SANGYO GIJUTSU KENKYU SENTAA
International Classes:
C01G1/00; C01G3/00; C30B23/08; H01B12/00; H01B12/06; H01B13/00; H01L39/24; (IPC1-7): C01G3/00; C01G1/00; C30B23/08; H01B12/00; H01L39/24
Domestic Patent References:
| JP2275702A |
Attorney, Agent or Firm:
Takehiko Suzue