Title:
PRODUCTION OF PELLICLE
Document Type and Number:
Japanese Patent JP3027470
Kind Code:
B2
Abstract:
PURPOSE: To obtain the process for production of the pellicle in order to obtain the surely and uniformly fixed pellicle by increasing the strength of adhesion between a pellicle frame and an optical thin film.
CONSTITUTION: The process for production of the pellicle having the optical thin film 1 provided with an antireflection layer consists of (1) a stage for fixing a film body carrying the optical thin film 1 for the pellicle, (2) a stage for preparing and fixing a mold having a groove corresponding to the desired part of the film body, (3) a stage for bringing the grooved mold and the film body into contact with each other under a reduced pressure while holding the film body fixed, (4) a stage for removing the antireflection layer by introducing a soln. necessary for removing at least the outermost layer of the antireflection layer in the desired part of the film body into the groove, (5) a stage for separating the mold and the film body and (6) a stage for bringing the pellicle frame 2 with an adhesive 3 and the film body into contact with each other via a part 6 where at least a part of the antireflection layer is removed, then curing the adhesive 3.
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Inventors:
Hideki Araki
Yuki Matsui
Yuki Matsui
Application Number:
JP5249592A
Publication Date:
April 04, 2000
Filing Date:
March 11, 1992
Export Citation:
Assignee:
Asahi Kasei Electronics Co., Ltd.
International Classes:
G03F1/62; H01L21/027; (IPC1-7): G03F1/14; H01L21/027
Domestic Patent References:
| JP62206551A | ||||
| JP325442A | ||||
| JP4199055A | ||||
| JP5158224A | ||||
| JP273256A |
Attorney, Agent or Firm:
Hidetake Komatsu (2 outside)