Title:
PROJECTION ALIGNER AND PROCESS FOR FABRICATING DEVICE
Document Type and Number:
Japanese Patent JP2006261419
Kind Code:
A
Abstract:
To obtain a projection aligner and an aligning method, and a process for fabricating a device in which exposure quality is enhanced.
Planar shape of a reticle mounted on a reticle stage is measured and optimal correction term and correction method are selected depending on the measurements thus removing, canceling or compensating for the impairment factor of exposure precision caused by the planar shape of the reticle effectively.
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Inventors:
AMANO TOSHITAKA
Application Number:
JP2005077341A
Publication Date:
September 28, 2006
Filing Date:
March 17, 2005
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G03F7/20
Attorney, Agent or Firm:
Tetsuya Ito
Kazunori Saito
Kazunori Saito