To provide a quality evaluating method for a liquid repellent film to evaluate a characteristic of the liquid repellent film from a relationship map of a previously found film thickness and a contact angle and the film thickness and a dielectric constant by particularly forming a liquid crystal cell on the liquid repellent film, and measuring the contact angle or the dielectric constant by irradiation of the light in the method to evaluate liquid repellent capacity of a liquid repellent film processing part.
In a quality evaluating method of a liquid repellent film formed in a liquid repellent film processing part, a liquid crystal cell is formed on the liquid repellent film processing part, and a transparent base board 5 having a liquid crystal orientation film is arranged through a spacer 3 and a liquid crystal 4, and after the whole is packed (7) in a vacuum, and the light is applied, and the transmitted light or the reflected light is investigated, and a contact angle by water repellency is evaluated by the relationship between previously found orientation of the liquid crystal and a liquid repellent film.
NAKANISHI MASAJI
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