Title:
放射デバイス、基板上に材料を堆積させるための堆積装置、及び基板上に材料を堆積させるための方法
Document Type and Number:
Japanese Patent JP2022512764
Kind Code:
A
Abstract:
中空体と、中空体（２５０）内に配置された冷却デバイス（２４６）とを含む、放射デバイス（２００）が提供される。【選択図】図４Ａ
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Inventors:
Diegos-Campo, Jose Manuel
Piera Rigi, Fabio
Braunger, Stephen
Morrison, Neil
Stolei, Tobias
Alto, Holst
Steiniger, Geahart
Piera Rigi, Fabio
Braunger, Stephen
Morrison, Neil
Stolei, Tobias
Alto, Holst
Steiniger, Geahart
Application Number:
JP2021521384A
Publication Date:
February 07, 2022
Filing Date:
October 18, 2018
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C16/511; H01L21/31
Domestic Patent References:
| JP2014526113A | 2014-10-02 | |||
| JP2018156864A | 2018-10-04 |
Foreign References:
| WO2016128560A2 | 2016-08-18 | |||
| US20110076420A1 | 2011-03-31 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation
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