Title:
希土類酸化物含有溶射基板の製造方法及び積層板の製造方法
Document Type and Number:
Japanese Patent JP5532064
Kind Code:
B2
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Inventors:
Noriaki Hamatani
Koji Nakamura
Ryoji Iida
Koji Nakamura
Ryoji Iida
Application Number:
JP2012042710A
Publication Date:
June 25, 2014
Filing Date:
February 29, 2012
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C23C4/10; B32B7/06; B32B9/00; C04B35/653; C04B41/87; C04B41/90; C04B41/91; C23C4/18
Domestic Patent References:
| JP4506336A | ||||
| JP2004100045A | ||||
| JP4259368A | ||||
| JP60258465A | ||||
| JP2005139554A | ||||
| JP2001207252A | ||||
| JP2000103690A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa