Title:
ロボット、搬送装置、電子デバイスプロセスシステム、及び関連する方法
Document Type and Number:
Japanese Patent JP7342046
Kind Code:
B2
Abstract:
A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.
Inventors:
Hosek Martin
Hoffmeister Christopher
Hoffmeister Christopher
Application Number:
JP2021005429A
Publication Date:
September 11, 2023
Filing Date:
January 18, 2021
Export Citation:
Assignee:
PERSIMMON TECHNOLOGIES, CORP.
International Classes:
B25J9/06; H01L21/677
Domestic Patent References:
| JP2000167792A | ||||
| JP2005197752A | ||||
| JP63042142A |
Foreign References:
| WO2012064949A1 | ||||
| US4865577 |
Attorney, Agent or Firm:
Mitsunori Kawamorida