PURPOSE: To prevent the release of the solid substance bonded to a bottom or side surface and to stably obtain a uniform film by providing the bottom and side surfaces in a rotatable manner centering around a rotary table 2 and providing a liquid supply means for supplying a liquid wetting the rotating bottom or side surface.

CONSTITUTION: A bottom surface 3 and a side surface 4 are rotated along with the rotation of a rotary table 2 and the coating solution supplied to the object to be coated placed on the rotary table 2 is shaken off by centrifugal force to be adhered to both of the side surface 4 and the bottom surface 3. Since the side surface 4 and the bottom surface 3 are wetted with the liquid supplied from a liquid supply means 6, the coating solution adhered to the side and bottom surfaces 4, 3 is not dried and solidified to become a single layer film or a structure wherein fine solid particles generated from the coating solution are strongly bonded to each other and prevented from release. By this method, the solid substance adhered to the bottom and side surfaces is prevented from release and a uniform film can be obtained stably.