Title:
塩、酸発生剤及びレジスト組成物
Document Type and Number:
Japanese Patent JP5750317
Kind Code:
B2
Inventors:
Takashi Hiraoka
Hiroshi Sakamoto
Koji Ichikawa
Hiroshi Sakamoto
Koji Ichikawa
Application Number:
JP2011142717A
Publication Date:
July 22, 2015
Filing Date:
June 28, 2011
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07D207/12; C07C381/12; C07D211/46; C07D327/08; C07D451/10; C09K3/00; G03F7/004; G03F7/039
Domestic Patent References:
| JP2012013807A | ||||
| JP2006257078A | ||||
| JP2012006908A | ||||
| JP2011148766A | ||||
| JP2010134279A | ||||
| JP2009209128A | ||||
| JP2008065266A |
Foreign References:
| US20100136479 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation