To provide a semiconductor integrated circuit device, and its inspecting apparatus, easily locating defective points of a semiconductor integrated circuit device.

Relating to the semiconductor integrated circuit device as well as its inspecting apparatus, photoelectric conversion elements (Di1-10) are provided in which a cathode is connected to an internal signal line (a node to be measured) of a circuit 11 to be measured, and an anode is connected to a fixed potential. When the photoelectric conversion elements (Di1-10) are irradiated with laser beam, a voltage potential is generated between the internal signal line and the fixed voltage potential.