Title:
SEMICONDUCTOR STORAGE DEVICE
Document Type and Number:
Japanese Patent JP2018156975
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor storage device having a high reliability.SOLUTION: A semiconductor storage device comprises: a semiconductor member that extends in a first direction; first wiring that extends in a second direction crossing the first direction; and a first electrode arranged between the semiconductor member and the first wiring. A curvature radius of a corner part opposed to the semiconductor member in the first electrode is larger than that of a corner part opposed to the first wiring in the first electrode.SELECTED DRAWING: Figure 4
Inventors:
KATO TATSUYA
ARAI FUMITAKA
SAKAIKE KOHEI
NAGASHIMA MASASHI
ARAI FUMITAKA
SAKAIKE KOHEI
NAGASHIMA MASASHI
Application Number:
JP2017050087A
Publication Date:
October 04, 2018
Filing Date:
March 15, 2017
Export Citation:
Assignee:
TOSHIBA MEMORY CORP
International Classes:
H01L27/11517; H01L21/336; H01L27/11568; H01L27/11582; H01L29/788; H01L29/792
Attorney, Agent or Firm:
Masahiko Hinataji