Title:
SEMICONDUCTOR THIN FILM AND METHOD OF FABRICATING SAME
Document Type and Number:
Japanese Patent JPS5472954
Kind Code:
A
Abstract:
A method for manufacturing a thin and flexible ribbon wafer of semiconductor material such as germanium, silicon, selenium, tellurium, PbS, InSb, ZnTe, PbSe, InAs, InP, GaSb, PbTe, ZnS, Bi2Te3, and mixtures thereof comprises melting the semiconductor material at a temperature within the range from a melting point thereof to 300 DEG C. above the melting point to form a uniform melt; ejecting under a pressure the melt through a nozzle against a cooling surface of a moving substrate to cool very rapidly a jet flow of the melt at a cooling rate of 1,000 DEG C. to 1,000,000 DEG C./sec to form the ribbon type thin and flexible wafer of fine and compact microscopic structure having a large mechanical strength and an excellent electrical property. It is possible to add to the melt various additives as fluxes or impurities such as B, P, BP, Sb Sn, As, B, P, Sb, In, Al and alloys intermetallic compounds, and conjugates thereof. The thin ribbon wafer as grown is preferably heated at a temperature from within the range 500 DEG C. to the melting point for a time within the range from 0.1 second to one week. The invention also provides a thin and flexible ribbon wafer of semiconductor material manufactured by the above mentioned process.
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Inventors:
TSUYA NOBORU
ARAI KENICHI
ARAI KENICHI
Application Number:
JP14010377A
Publication Date:
June 11, 1979
Filing Date:
November 23, 1977
Export Citation:
Assignee:
TSUYA NOBORU
International Classes:
B22D11/06; C22C1/00; C30B11/00; C30B11/14; C30B15/06; C30B29/64; H01L21/208; H01L31/04; H01L31/18; (IPC1-7): B01J17/06; H01L21/208
Other References:
IEEE TRANS=1976