Title:
形状測定機及びその制御方法
Document Type and Number:
Japanese Patent JP7445845
Kind Code:
B2
Abstract:
To provide a shape measuring machine and control method of the shape measuring machine that enable easy detection of a cause of irregularity occurrence of a shape measurement of a measurement object.SOLUTION: A shape measuring machine comprises: a displacement detector that detects a displacement of a probe along a predetermined detector sensitivity direction; a relative movement mechanism that causes the displacement detector to relatively move to a measurement object, and causes a measured surface of the measurement object to be traced by the probe; a position detection sensor that detects a relative position of the displacement detector to the measurement object; an oscillation detection unit that detects oscillation in a detector sensitivity direction; and a synchronization control unit that, while the relative movement is performed by the relative movement mechanism, causes three actions including the detection of the relative position by the position detection sensor, the detection of the displacement by the displacement detector and the detection of the oscillation by the oscillation detection unit to be repeatedly implemented in synchronization with each other.SELECTED DRAWING: Figure 1
Inventors:
Hikaru Masuda
Hideki Morii
Hideki Morii
Application Number:
JP2020085358A
Publication Date:
March 08, 2024
Filing Date:
May 14, 2020
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
G01B5/20
Domestic Patent References:
| JP2000310527A | ||||
| JP2019007839A | ||||
| JP7083653A | ||||
| JP2018136149A | ||||
| JP2001349722A | ||||
| JP2014109495A |
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
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