Title:
SHIFT ERROR CORRECTING METHOD
Document Type and Number:
Japanese Patent JPH0328909
Kind Code:
A
Abstract:
PURPOSE:To attain the shift control with high accuracy and to improve the throughput by detecting previously a shift error peculiar to a shift system with recognition of the pattern of an error information collecting substrate and adding this detected error information to the transfer goal information to produce a shift position command. CONSTITUTION:A shift part 18 is driven based on the shift goal information received from a CPU 54 of a shift control part. At the same time, the shift position information on the part 18 is detected by recognizing the pattern of an error information collecting substrate via a TV camera 64 of a fine align ment part 16. Then an error is measured between the shift goal information and the shift position information, i.e., the shift result and stored in a shift error information memory 58 in accordance with the shift goal information. When the actual shift control is carried out, the shift of the part 18 is controlled based on the shift goal information and its corresponding error information. Thus the shift error can be corrected with the same accuracy despite the change of the type of an object to be shifted.
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Inventors:
SASAZAKI HISAO
Application Number:
JP16425389A
Publication Date:
February 07, 1991
Filing Date:
June 26, 1989
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01B11/00; G05B19/18; G05B19/404; G05D3/12; H01L21/66; (IPC1-7): G01B11/00; G05B19/18; G05D3/12; H01L21/66
Domestic Patent References:
| JPS6387739A | 1988-04-19 |
Attorney, Agent or Firm:
Hajime Inoue (1 person outside)
Next Patent: JPH0328910