Title:
炭化珪素単結晶ウェハ表面の研磨方法
Document Type and Number:
Japanese Patent JP5277722
Kind Code:
B2
Inventors:
Hirokatsu Yashiro
Tatsuo Fujimoto
Taizo Hoshino
Takashi Aigo
Masakazu Katsuno
Hiroshi Tsuge
Masashi Nakabayashi
Yoshio Hirano
Noboru Otani
Kohei Tatsumi
Tatsuo Fujimoto
Taizo Hoshino
Takashi Aigo
Masakazu Katsuno
Hiroshi Tsuge
Masashi Nakabayashi
Yoshio Hirano
Noboru Otani
Kohei Tatsumi
Application Number:
JP2008133348A
Publication Date:
August 28, 2013
Filing Date:
May 21, 2008
Export Citation:
Assignee:
Nippon Steel & Sumitomo Metal Corporation
International Classes:
H01L21/304; B24B37/00; B24B39/04; C30B29/36; C30B33/00; H01L21/306
Domestic Patent References:
| JP2007311586A | ||||
| JP2006528423A | ||||
| JP2005286038A |
Attorney, Agent or Firm:
Katsuo Naruse
Tomohiro Nakamura
Masashi Torino
Kazuya Sasaki
Tomohiro Nakamura
Masashi Torino
Kazuya Sasaki