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Title:
シリコン単結晶引上装置
Document Type and Number:
Japanese Patent JP6617680
Kind Code:
B2
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Inventors:
Takeyasu
Application Number:
JP2016209181A
Publication Date:
December 11, 2019
Filing Date:
October 26, 2016
Export Citation:
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Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
C30B29/06; C30B15/00; F27B14/08
Domestic Patent References:
JP2002316896A
JP2009161416A
Attorney, Agent or Firm:
Mikio Yoshimiya
Toshihiro Kobayashi



 
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