単結晶保持装置 - sumco tech xiv Co., Ltd.

Title:

単結晶保持装置

Document Type and Number:

Japanese Patent JP4026694

Kind Code:

B2

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Inventors:

Kurosaka Nori
Junsuke Tomioka
Masakazu Kobayashi
Yoshimoto Akihiro
Oshishitoshi
Kazuhiro Mimura
Hiroshi Kadota
Hiroshi Yoshinada
Kenji Okamura

Application Number:

JP5130198A

Publication Date:

December 26, 2007

Filing Date:

February 18, 1998

Export Citation:

Assignee:

sumco tech xiv Co., Ltd.

International Classes:

C30B15/30; C30B29/06; H01L21/208

Domestic Patent References:

JP11100291A

Attorney, Agent or Firm:

Takahisa Kimura
Yoshiyuki Obata

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