To provide a sintered silicon nitride compact having high strength, high toughness, and high thermal conductivity.
At least one kind of element selected from the group consisting of Y and rare-earth elements (RE) and Mg are added as components of a sintering aid to the sintered silicon nitride compact. Microparticles with an average diameter of ≤100 nm, in which 0.6-10 wt.% of Y and the rare-earth elements in terms of the rare-earth oxides (RExOy) and Mg in terms of magnesium oxide (MgO) are contained as the total oxide content in terms of these oxides, the weight ratio represented by (RExOy)/(MgO) is >1, and the components of the sintering aid, oxygen, nitrogen, and silicon are contained, are deposited in silicon nitride particles composing the sintered silicon nitride compact.
KAWADA TSUNEHIRO
SOFUE MASAHISA
| JP2001080965A | 2001-03-27 | |||
| JP2001064080A | 2001-03-13 | |||
| JP2002097005A | 2002-04-02 | |||
| JP2001316188A | 2001-11-13 | |||
| JP2001293315A | 2001-10-23 | |||
| JPH06279124A | 1994-10-04 |
Yasuhiro Shioda