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Patent Searching and Data


Title:
SOLUTION MATERIAL FOR UNDERLAYER FILM AND PATTERN FORMING METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2001272788
Kind Code:
A
Abstract:

To provide a solution material for an underlayer film having etching resistance and an antistatic effect and capable of forming a film by a coating method, and a pattern forming method using the solution material.

The solution material contains at least one selected from the group comprising organic compounds each having ≥85 wt.% carbon content per one molecule and metallic compounds and a surfactant. The pattern forming method has a step for forming an underlayer film on a film to be worked by coating the top of the film to be worked with the solution material, a step for forming a resist film on the underlayer film and a step for forming a resist pattern by patternwise exposing the resist film.


Inventors:
SATO YASUHIKO
ONISHI KIYONOBU
Application Number:
JP2000085109A
Publication Date:
October 05, 2001
Filing Date:
March 24, 2000
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G03F7/11; G03F7/004; H01L21/027; (IPC1-7): G03F7/11; G03F7/004; H01L21/027
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)