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Title:
スパッタリングターゲット、透明導電膜及び透明電極
Document Type and Number:
Japanese Patent JP5330469
Kind Code:
B2
Abstract:
A sputtering target including indium, tin, zinc and oxygen, and including a hexagonal layered compound, a spinel structure compound and a bixbyite structure compound.

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Inventors:
Yano official rule
Kazuyoshi Inoue
Nobuo Tanaka
Application Number:
JP2011188298A
Publication Date:
October 30, 2013
Filing Date:
August 31, 2011
Export Citation:
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Assignee:
IDEMITSU KOSAN CO.,LTD.
International Classes:
C23C14/34; C23C14/08; H01B5/14; H01B13/00
Domestic Patent References:
JP2004294630A
Foreign References:
WO2007034733A1
WO2000012445A1
Attorney, Agent or Firm:
Kihei Watanabe
Yuko Tanaka
Takeshi Sato



 
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