Title:
ステージ装置
Document Type and Number:
Japanese Patent JP6723642
Kind Code:
B2
Abstract:
The present invention provides a stage apparatus that provides a technique which is capable of realizing high precision of a stage apparatus. The stage apparatus includes a first movable body (12), a first X-axis driving unit (16) and a second X-axis driving unit (18) configured to drive the first movable body (12) along the X-axis direction, and a second movable body (14) is configured to guide the movement of the first movable body (12) in the X-axis direction and is configured to move in the Y-axis direction. The first X-axis driving unit (16) and the second X-axis driving unit (18) are supported without passing through the second movable body (14).
Inventors:
Ryuta Nakajima
Application Number:
JP2016097770A
Publication Date:
July 15, 2020
Filing Date:
May 16, 2016
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01L21/68; B23Q1/62; G03F7/20
Domestic Patent References:
| JP9219353A | ||||
| JP10074685A | ||||
| JP5077126A | ||||
| JP2014098731A | ||||
| JP2013538434A | ||||
| JP8233964A | ||||
| JP2002022867A | ||||
| JP7086377A | ||||
| JP2009105439A | ||||
| JP10293611A | ||||
| JP2013217950A |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo