PURPOSE: To improve the releasability between a stamper and resin and conse quently prolong the service life of the stamper and reduce the cost of medium by a method wherein the surface of the stamper is covered by solid lubricant such as molybdenum disulfide, graphite.
CONSTITUTION: After a stamper is produced by conventional method and stripped, the surface of the stamper is rinsed and, after that, coated with solid lubricant having good releasability such as molybdenum disulfide, graphite by applying magnetron sputtering method or the like. When a guide-grooved substrate is produced by using the stamper, onto which said solid lubricant is applied, the stamper can be easily stripped from resin without being applied by excessive force due to the low frictional coefficient of the solid lubricant. In addition, as the means of application of the solid lubricant, vapor deposition method or CVD can also be adopted.
HARA NORIAKI
KUDO YOSHIHIKO
