To obtain a pure steam in which a flux of the steam is controlled in stable manner and a mixed impurity is not contained, without using a steam flux control mechanism.
In a wave guide 11 arranged with a magnetron 12 inside, a container 13 made from silica glass which is equipped with a porous medium 14 is arranged. And a water inlet pipe 15, a water outlet pipe 16, and a drainage pipe 17 are connected to the container 13. Pure water controlled by a flux control valve 18 to a predetermined flux is dropped on the upper surface of the porous medium 14, and permeates the inside promptly. When microwave is supplied in the wave guide 11 from the magnetron 12, the pure water currently held inside the porous medium 14 is heated by microwave heating and evaporated in an instant to come out from the surface to the exterior, and is carried to the outside through the steam outlet pipe 16. By controlling the amount of the flux of the pure water and the output power of the magnetron 12 appropriately, since all the supplied pure water serves as steam, the amount of the steam flux can be controlled by the flux control valve 18.
MAKIKAWA SHINJI
ONODA TADAYOSHI
SHINETSU CHEMICAL CO
SHINETSU ENG CO LTD
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