To provide a sterilization washing process which conducts the sterilization washing treatment efficiently without wasting time by effecting a step of washing and sterilization of other containers of a material to be treated and the like during a holding time for obtaining the sterilization effect after a step of washing and sterilization of one container of a material to be treated.

The sterilization washing device is provided with a central treatment part A to conduct the treatment of each container, treatment head 8 having a nozzle 12 to jet a liquid installed at the treatment part A, a liquid supply means 16 to supply a washing liquid, disinfectant and the like to the treatment head 8 by switching them and a four container installation parts B, C, D and E which are arranged at the surroundings of the treatment part A. The sterilization washing process includes performing a first step of jetting the washing liquid to the container 2B on the first installation part B and a second step of jetting the disinfectant, then performing a third step of leaving them as they are. During the third step, the first step and the second step of three containers 2C, 2D and 2E are performed in order. After that, a fourth step to each container 2B, 2C, 2D and 2E on the first installation part B to the fourth installation part E is sequentially performed.