Title:
保管システムと保管システムでのパージ方法
Document Type and Number:
Japanese Patent JP6813097
Kind Code:
B2
Abstract:
A storage system comprises: a plurality of shelves, respectively provided with a nozzle for supplying clean gas into containers; a plurality of flow amount controlling devices, respectively controlling supply amount of clean gas to a nozzle; a transport apparatus transferring the containers to and from the shelves; and a controller controlling the transport apparatus and the flow amount controlling devices. The controller makes an assignment of at least one shelf in preparation for storing an incoming container and before the occurrence of the incoming container, and controls a flow amount controlling device to supply clean gas to the nozzle in the at least one shelf, based upon the assignment.
Inventors:
Tatsuo Tsubaki
Takashi Yamaji
Takashi Yamaji
Application Number:
JP2019540805A
Publication Date:
January 13, 2021
Filing Date:
July 19, 2018
Export Citation:
Assignee:
Murata Machinery Co., Ltd.
International Classes:
H01L21/677; B65G1/00; H01L21/673
Domestic Patent References:
| JP2013139319A | ||||
| JP2015009911A | ||||
| JP2010016199A | ||||
| JP7130831A | ||||
| JP2015009913A | ||||
| JP2010182747A |
Foreign References:
| WO2017026168A1 |
Attorney, Agent or Firm:
Akira Shioiri
Mika with salt
Mika with salt
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