Title:
SUBSTRATE CARRYING DEVICE
Document Type and Number:
Japanese Patent JP3493725
Kind Code:
B2
Abstract:
PURPOSE: To enable reduction of a carrier course and rapid replacement of substrate by providing a rotary arm part which delivers a substrate between a substrate temporary storage part and a substrate stage and by replacing a desired substrate by rotation and vertical movement of a substrate holding part and a temporary storage part of the rotary arm part.
CONSTITUTION: After a substrate RA inside a substrate storage part 4 is unloaded by a hand part 7 of a multiaxial robot hand 6, a Z-axis slider 10 is raised and mounted on a supporting pin 17 on a stand-by surface 16a of a temporary storage shelf 13. An upper end of the supporting pin and an upper surface of a substrate stage 25 are set at an approximately the same height. Then, arms 23A and 23B of a rotary arm 18 are closed below the substrate RA and arms 24A and 24B below the substrate RA which is processed on a substrate stage 25 are closed, the Z-axis slider 20 is raised and a rotary part 21 is rotated by 180°. Thereafter, the slider 20 is lowered and a substrate is replaced and delivered. According to such operations, a carrier source of a substrate is reduced and replacement can be carried out rapidly.
Inventors:
Kanefumi Nakahara
Application Number:
JP10951594A
Publication Date:
February 03, 2004
Filing Date:
May 24, 1994
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/677; B65G49/06; G03F7/20; H01L21/027; (IPC1-7): H01L21/68; B65G49/06; H01L21/027
Domestic Patent References:
| JP63208452A | ||||
| JP1251734A | ||||
| JP4199654A | ||||
| JP5278813A |
Attorney, Agent or Firm:
Satoshi Ohmori