PURPOSE: To prevent the electrification of a substrate at the time of removing the substrate from the placing surface of the substrate holder.

CONSTITUTION: A dike-shaped member 3a is provided to enclose an aperture 5a on the placing surface 3 of this substrate holder 1 and a hermetic space 4 is formed of the substrate and the dike-shaped member 3a. A positive pressure controller 8 is provided with a humidity control section 10 for supplying a high-humidity gas to the hermetic space at the time of releasing the attraction of the substrate attracted to the holder with a positive pressure gas. Further, an ionizing gas generator 11 which supplies an ionized gas to the substrate placing the substrate is separated from the top of the placing surface and is transferred onto a transporting device is provided.