Title:
SUBSTRATE PROCESSOR AND SUBSTRATE PROCESSING METHOD
Document Type and Number:
Japanese Patent JP3967508
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To overcome a problem that a substrate is not always located at a conveying position from its processing chamber when rocking is ended, as a substrate conveying speed at the time of rocking is fixed.
SOLUTION: A conveying speed of a substrate at the time of rocking is calculated from the number of times of rocking, a rocking distance and a rocking time of the substrate, and the substrate is rocked while conveyed, based on the calculated conveying speed of the substrate, and also a treatment agent is supplied to the rocking substrate.
Inventors:
Masashi Nakayama
Application Number:
JP36291699A
Publication Date:
August 29, 2007
Filing Date:
December 21, 1999
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/677; B65G49/06; B65G49/07; H01L21/027; H01L21/304; H01L21/306; H01L21/68; (IPC1-7): H01L21/68; B65G49/06; B65G49/07; H01L21/027; H01L21/304; H01L21/306
Domestic Patent References:
| JP8115969A |
Attorney, Agent or Firm:
Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita
Yoshitake Hidetoshi
Takahiro Arita