Title:
SUBSTRATE HOUSING CONTAINER
Document Type and Number:
Japanese Patent JP2016119327
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate housing container which suppresses remaining of a washing water in a communication part.SOLUTION: A communication part 93 includes: an opening facing wall part 931; a gas lead-out part 941 that guides a gas G1 from a ventilation path 801 of a filter part 80 that is collided against the opening facing wall part 931 to a gas jet nozzle part 91; a communication part passage 945 that is formed by the opening facing wall part 931 and the gas lead-out part 941 and causes the gas from the ventilation path 801 of the filter part 80 to flow to the gas jet nozzle part 91; and a drain suppression wall part 935 that extends toward the filter part 80 from the opening facing wall part 931, and prevents the gas G1 from the ventilation path 801 of the filter part 80 that is collided against the opening facing wall part 931 from leaking from the communication part passage 945. An extension end part of the drain suppression wall part 935 and the filter part 80 have a positional relationship of being separated from each other, and a gap 806 is formed between the extension end part of the drain suppression wall part 935 and the filter part 80.SELECTED DRAWING: Figure 9
Inventors:
TOMITA MINORU
NARITA YUYA
NARITA YUYA
Application Number:
JP2014256311A
Publication Date:
June 30, 2016
Filing Date:
December 18, 2014
Export Citation:
Assignee:
MIRAIAL KK
International Classes:
H01L21/673; B65D85/86
Attorney, Agent or Firm:
Masayuki Masabayashi
Hayashi Ichiyoshi
Iwaike Mitsuru
Hayashi Ichiyoshi
Iwaike Mitsuru