To easily take out a surface-treated substrate, regardless of the size of the substrate which can be positioned easily.

In this method, an elastic substrate 2 is placed on a table 1, the substrate 2 is surface-treated, and then the substrate 2 is taken out from the table 1. The surface of the table 1 has an arc-shaped recessed shape. For surface treatment, the substrate 2 is deflected into an arc shape along the arc- shaped recessed surface 11 of the table 1. Then, the substrate 2 is surface- treated. Subsequently, the substrate 2 is formed almost rectilinear by coursing the deflection to be eliminated. Then, the side face 21 of the substrate 2 is held by a chuck, and the substrate is taken out from the table 1.