Title:
基板温度制御機構
Document Type and Number:
Japanese Patent JP3986598
Kind Code:
B2
Inventors:
Kiyoshi Nashimoto
Hajime Sahase
Nobuyuki Takahashi
Hajime Sahase
Nobuyuki Takahashi
Application Number:
JP28613996A
Publication Date:
October 03, 2007
Filing Date:
October 08, 1996
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
F27B5/14; H01L21/683; F27B5/18; H01L21/205; H01L21/68
Domestic Patent References:
| JP6232238A | ||||
| JP5209278A | ||||
| JP8125001A | ||||
| JP5090273A |
Attorney, Agent or Firm:
Koichi Hotate