Title:
基板搬送装置およびそれを備えた基板処理装置
Document Type and Number:
Japanese Patent JP4219195
Kind Code:
B2
Inventors:
Shigeki Minami
Naoyuki Osada
Naohisa Okada
Naoyuki Osada
Naohisa Okada
Application Number:
JP2003069455A
Publication Date:
February 04, 2009
Filing Date:
March 14, 2003
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/13; H01L21/677; B08B3/02; B65G13/00; B65G49/06; B65G49/07; G02F1/1333; H01L21/027; H01L21/304; H01L21/68
Domestic Patent References:
| JP9129702A | ||||
| JP2214467A | ||||
| JP2002145426A |
Attorney, Agent or Firm:
Yoshito Fukushima