To obtain a surface form measuring instrument which can measure the true surface form of an object to be measured more accurately.
This is a surface form measuring instrument which which measures the surface form of a measurement object by carried out calculation based on a moved distance relatively moved between an object 16 to be measured and a distance to the surface of the object 16. A plurality of distance sensors 11-15 for measuring the distance to the surface of the object 16 are arranged in such a manner that pairs of the distance sensors 11, 15 and 12, 14 which are arranged symmetrically having the same distance by setting the distance sensor 13 as center are so arranged along a moving direction that distance between the outermost pair of the distance sensors 11, 15 is made at most the distance traversed (length of the object 16).
TANABIKI HIROSHI
MAEDA KOZO
HONDA AKIYOSHI
Hisao Kobayashi
Kiyoshi Yasushima
Noboru Omura
Takanashi Norio
Saburo Kimura
Next Patent: SURFACE FORM MEASURING METHOD AND PROGRAM OF ITS METHOD